CMOS Nanoelectronics: Innovative Devices, Architectures, and by Nadine Collaert

By Nadine Collaert

This booklet covers probably the most very important gadget architectures which have been generally researched to increase the transistor scaling: FinFET. beginning with conception, the publication discusses the benefits and the combination demanding situations of this equipment structure. It addresses intimately the themes resembling high-density fin patterning, gate stack layout, and source/drain engineering, that have been thought of demanding situations for the mixing of FinFETs. The publication additionally addresses circuit-related elements, together with the effect of variability on SRAM layout, ESD layout, and high-T operation. It discusses a brand new gadget inspiration: the junctionless nanowire FET.

Show description

Read Online or Download CMOS Nanoelectronics: Innovative Devices, Architectures, and Applications PDF

Best circuits books

Representation of Multiple-Valued Logic Functions

In comparison to binary switching services, the multiple-valued services (MV) supply extra compact representations of the knowledge content material of signs modeled by way of common sense capabilities and, hence, their use suits rather well within the common settings of information compression makes an attempt and techniques. the 1st job in facing such indications is to supply mathematical tools for his or her illustration in a manner that would make their software in perform possible.

Advances in High-Performance Motion Control of Mechatronic Systems

Mechatronic structures are utilized in quite a number patron items from large-scale braking structures in vehicular brokers to small-scale built-in sensors in cellphones. to maintain velocity within the aggressive patron electronics undefined, businesses have to regularly enhance servo assessment and place keep watch over of those mechatronic platforms.

The Capacitor Handbook

A protracted and sundry adventure in lots of components of digital circuit layout has confident me that capacitors are the main misunderstood and misused digital part. This e-book offers sensible assistance within the knowing, building, use, and alertness of capacitors. conception, mixed with circuit software suggestion, might help to lower than­ stand what is going on in every one part and within the ultimate layout.

Circuit techniques for low-voltage and high-speed A/D converters

This beneficial monograph offers a complete of 7 prototypes: double-sampled S/H circuits, a time-interleaved ADC, an IF-sampling self-calibrated pipelined ADC, a present guidance DAC with a deglitcher, and pipelined ADCs utilising the SO strategies.

Additional info for CMOS Nanoelectronics: Innovative Devices, Architectures, and Applications

Example text

Extraction of the top and sidewall mobility in FinFETs and the impact of finpatterning processes and gate dielectrics on mobility,” IEEE Trans Electron Devices, 54(5), 1177–1184, 2007. 41. , Cleavelin C. -S. and Colinge J. , “Improvement of FinFET electrical characteristics by hydrogen annealing,” IEEE Electron. Device Lett, 25(8), 541–543, 2004. 42. , Hussain M. , Harris H. , Jammy R. and Thompson S. , “Comparison of uniaxial wafer bending and contact-etch-stop-liner stress induced performance enhancement on double-gate FinFETs,” IEEE Electron.

Therefore, ions with energy of 10eV can accelerate the etching of the c-Si fin sidewalls by Br species. 15. Top view SEM image after c-Si fin patterning. (a) Inspection after SL, the process optimization shows smooth side walls after the SL step. (b) Inspection after full dry etching (OE included), the side walls remained smooth. Once the possible mechanism was understood, the SWR was straightforward solved. The severe SWR in the center of the wafer was reduced when the CD was optimized. This means that the ACL HM was patterned in one single step with high selectivity towards the c-Si.

However, after the HM patterning, the fin CD increased from 19 to 28 nm, ending up with CDs 11 nm wider than the 17 nm target. It was almost impossible to reach the CD target through the optimization of the HM patterning approach used on the previous 32 nm nodes. Sequential CD SEM measurements indicated that both HM etching steps contribute to this CD increment. 35% of this CD increment was attributed to the Cl2 /O2 July 26, 2012 16:10 PSP Book - 9in x 6in 42 Dry Etching Patterning Requirements for Multi-Gate Devices chemistry used during the ACL1 step.

Download PDF sample

Rated 4.68 of 5 – based on 43 votes
Posted In CategoriesCircuits